NEMS AB

NEMS AB is a small business venture with its roots in the Nanometer Consortium at Lund University. The main field of business activities is development of low cost Nano Electro Mechanical Systems (NEMS) for sensor applications. The field of NEMS has recently received increasing attention due to the potential for fabricating small sized components like bio sensors, optical devices, electrical switches and filters etc. NEMS AB is in possession of a patented technology for low-cost fabrication of NEMS devices on mass scale, using photolithographic or nano-imprint technologies in preferably polymer materials to create electrically activated cantilever arrays. The potential for easy integration with silicon processes renders NEMS structures even more attractive.

The development of nanoimprint high aspect ratio lithography, as with the current application, will provide a solution to production of nanometer-sized grating arrays. This is the only necessary manufacturing process step to create the gratings defining the mechanical properties of the sensors or electronic devices. Additional metal and functionalisation layers are necessary to deposit on top of the cantilevers to achieve the required device performance.