The NIMBle* Platform

(*Nano Imprintable Metallized and Bendable)

The platform on which the NEMS devices are based combines simplicity with versatility. Depicted to the right, the basic, patented structure consists of fingers electrically coupled in pairs. Because the fingers are fixed lengthwise at the bottom, the structure can be printed in a polymer, using Nanoimprint lithography (NIL). For electrical contact, a metal, such as gold or aluminum, is then added on top without any additional patterning.

By applying an electrical charge, the fingers can be made to bend towards each other, changing characteristics such as capacitance. Applying an alternating voltage of the right frequency causes the fingers to resonate.


NIMBle

The NIMBle platform.

Nano Imprint Lithography

Nano imprint lithography is a printing technique, which utilizes a stamp to pattern materials such as polymers. These may be spun onto a glass or silicon wafer, or may be available in plastic sheets. In order to fully realize the potential of the NIMBle structure, NEMS AB has been pushing the limits of technology for using NIL to create structures with high aspect ratios (high and thin). By using the right materials and processes, regular production of structures as thin as 50 nm and as high as 600 nm - an aspect ratio of over 10 - is now part of daily operations.

The use of NIL enables production of devices that are:

  • low cost, easy to manufacture
  • based on the use of versatile polymers
  • very small dimensions, yet distinct
  • integratable