New Ultra-Sensitive Sensor

NEMS AB proudly presents a novel platform for mass sensitive sensors for detection of airborne chemicals. The simple principle is that an added mass causes a shift in the resonance frequency of the nano-sized structures. The polymer, the metal or added functionalization layers can be chosen to get the selectivity to specific target molecules.

Because of the low mass of the moving structures, the response to an added mass is proportionally high. Performance of similar devices is commonly given in mass per unit frequency shift. Even without optimization, the NEMS device has shown a mass sensitivity of 11 zg/Hz. (The prefix z for zepto indicates 10-21).

Advantages of the NEMS sensor

  • Polymer based sensors, manufactured by printing technique, have a potential of very low cost solutions. Can be manufactured even on a plastic foil.
  • Very small size and the low temperature processing make it easy to integrate the sensors on almost any kind of substrate.
  • Sensor performance can be tailored by layout.
  • Batch processing and sensor arrays are easy to implement.

The graph below shows the frequency shift caused by the adsorpotion of a gaseous thiol. Other gases detected include ethanol, acetone and water vapor. For more information about our technical platform you can find a published article at IOP Nanotechnology.

Plot showing sensor performance

A shift in mass causes a shift in frequency after the adsorption of gaseous thiols.

Device testing using RF probes

Device under test using RF probes and temperature control by a peltier element.